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We summarized The existing development standing with the high-electrical power DUV laser both equally at the wavelength of FHG on the one-μm laser and at 193 nm. The new development from the stable-point out/fiber laser, along with the nonlinear optical crystals, prompts not just the common electricity but will also the beam quality (coherence) on the DUV lasers to an unprecedented degree.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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Both the 1040 nm and 1078 nm laser come from one twin-wavelength Yb-doped fiber laser. Every laser is amplified by phases of fiber amplifier and Yb-doped materials amplifier, respectively.
On the opposite side, the power scaling of your NIR laser is an additional facet to boost the average power with the 193-nm DUV laser. Due to insufficient the superior-electricity amplification Answer of your NIR laser (as an example at 1553 nm), nonlinear frequency procedures including optical parameter oscillation (OPO) can be applied to make a wavelength converter by shifting the wavelength from one μm to the desired wavelength together with obtaining relative larger electrical power [21]. A short while ago, a diamond Raman laser confirmed its capability in obtaining a superior energy and also a superior conversion efficiency in the 1st Stokes in the one-μm laser [22,23], which means the chance to be used in the 193-nm DUV laser technology because of its high Raman attain and enormous frequency shift.
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The conversion performance from fundamental NIR to DUV is from 5% to 36% in accordance with the noted leads to Desk one. Escalating the conversion effectiveness will lessen the burden on the look and set up of the elemental laser amplifier plus the electric powered energy usage. A fantastic beam high quality of the basic laser may even lead to your expanding of the conversion efficiency in addition to the appropriate energy intensity of the NIR and green laser in the SHG and FHG process, respectively. The best conversion efficiencies from NIR to inexperienced and eco-friendly to DUV laser by use of CLBO crystal are 70% and all-around fifty%, respectively [twelve], which corresponds for the conversion efficiency of 35% from elementary to DUV.
The development with the 193-nm laser was shown by stages of SFG. In an effort to scale the DUV laser power efficiently, a different concept from the 193-nm DUV laser era is offered based upon the diamond Raman laser.